| | Thru-beam type | Vacuum-resistant | M4 | 30 mm | No | Top-view | dia. 1.3 mm | 1m | R25mm | Not available | Fiber length change | Available | FV-LE1, FV-SV1, FV-SV2 | Not available | | | Vacuum-resistant | 300 degrees | -30 degrees | 270 mm 10.630 in (FX-500 series) | 1,000 mm 39.370 in (FX-500 series) | 590 mm 23.228 in (FX-500 series) | 470 mm 18.504 in (FX-500 series) | 55 mm 2.165 in (FX-500 series) | 160 mm 6.299 in (FX-500 series) | Particular use | 02##M4 | 08##R25mm | 06##201-300 degrees | 04##-30 degrees | 07##701-1000mm | | | | | | | | |
| | Convergent Reflective type | Glass substrate detection | | W19 x H5 x D27 mm | No | Top-view | | 3m | R25mm | Not available | Fiber length change | Not available | | Not available | | | Vacuum-resistant | 300 degrees | -30 degrees | 0 to 8 mm 0 to 0.315 in (FX-500 series) | 0 to 18 mm 0 to 0.709 in (FX-500 series) | 0 to 12 mm 0 to 0.472 in (FX-500 series) | 0 to 10 mm 0 to 0.394 in (FX-500 series) | 1.5 to 3 mm 0.059 to 0.118 in (FX-500 series) | 0 to 5.5 mm 0.217 in (FX-500 series) | Particular use | | 08##R25mm | 06##201-300 degrees | 04##-30 degrees | 01##0-50mm | | | | | | | | |
| | | | | | | | | | | | | | | | Nut: 14.7 N·m or less (M14 nut) | 20 N or less (Atmospheric / vacuum side fiber joint) | | | | | | | | | | | | | | | | FT-40V, FD-KZ50V, FD-L10V, FT-J9 | 1.0 x 10-10 Pa·m3/s [He] or less (* Measured with a He detector) | -30 to +120℃ -22 to +248℉ (Same for storage. Up to +40 ℃ +104℉ when humidity is high. However, no dew condensation or icing allowed.) | 35 to 85% RH (Same for storage) | V15 | 100 g approx. | Main unit: Stainless steel (SUS303), Holding bracket: Stainless steel (SUS301), Fiber: Quartz glass, O-ring: Fluororubber | 3.0 to 40.0 mm 0.118 to 1.575 in (Note) : Confirm the wall thickness in advance since the FV-FR1 cannot be installed to a vacuum chamber with a wall thickness outside the recommended thickness range. |
| | | | | | | | | | | | | | | | 9.8 N·m or less (M8 screw) | 20 N or less (Atmospheric / vacuum side fiber joint) | | | | | | | | | | | | | | | | FT-40V, FD-KZ50V, FD-L10V, FT-J9 | 1.0 x 10-10 Pa·m3/s [He] or less (* Measured with a He detector) | -30 to +120℃ -22 to +248℉ (Same for storage. Up to +40 ℃ +104℉ when humidity is high. However, no dew condensation or icing allowed.) | 35 to 85% RH (Same for storage) | V40 | 410 g approx. | Main unit: Stainless steel (SUS303), Holding bracket: Stainless steel (SUS301), Fiber: Quartz glass, O-ring: Fluororubber | 3.0 mm 0.118 in or more (Note) : If the vacuum chamber wall is too thick, the FV-FR4 may not be able to connect to the vacuum side fiber. In that case, connect the FV-FR4 to the vacuum side fiber before the installation. |
| | Reflective type | Vacuum-resistant / Long range | | W9.5 x H5.2 x D15 mm | No | Top-view | | 1m | R25mm | Not available | Fiber length change | Not available | | Not available | | | Vacuum-resistant | 300 degrees | -30 degrees | 20 to 200 mm 0.787 to 7.874 in (FX-500 series) | 5 to 500 mm 0.197 to 19.685 in (FX-500 series) | 10 to 340 mm 0.394 to 13.386 in (FX-500 series) | 15 to 270 mm 0.591 to 10.630 in (FX-500 series) | 20 to 45 mm 0.787 to 1.772 in (FX-500 series) | 20 to 120 mm 0.787 to 4.724 in (FX-500 series) | Flat type | | 08##R25mm | 06##201-300 degrees | 04##-30 degrees | 04##301-500mm | | | | | | | | |
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