LED Type Wafer Alignment Sensor Controller HD-T1

The HD-T1 Series is a new Wafer Alignment Sensor that uses a safe red LED light beam, with a resolution of 30µm, to achieve the same high level performance as Laser Sensors. The HD-T1 Sensor is best suited to detect wafer eccentricity, notches and orientation flats. Using linear image Sensor methodology and high-speed sampling technology, a wide variety of objects can now be stably measured with great precision at ultra-high speeds. This CCD style Sensor is developed for use in almost all fields of industry, e.g. tire manufacturing or Semiconductor production (Wafer Printed Circuit Boards). 

Characteristics: 

  • No Safety Measures Are Required
  • High Resolution Of 30µm
  • Easy Installation
  • No Need For Beam Axis Alignment
  • Low Current Consumption Of 70mA Or Less
  • Adjustment Functions For Both Span And Shift Have Been Incorporated

Part Number List

Results 2
Models table for series LED Type Wafer Alignment Sensor Controller HD-T1
Part No.DatasheetCE Marking Directive ComplianceApplicable ControllerSensing WidthSensing Range Pollution Degree Ambient TemperatureAmbient HumidityAmbient IlluminanceVoltage WithstandabilityInsulation Resistance Vibration ResistanceShock ResistanceEmitting ElementReceiving ElementMaterialCableWeight (Typ.)Applicable Sensor HeadSupply Voltage Current ConsumptionAnalog OutputAnalog Output: Response TimeAnalog Output: ResolutionAnalog Output: LinearityAnalog Output:Temperature CharacteristicsSpan Adjustment FunctionShift Adjustment Function Warming-Up PeriodCable Extension
EMC Directive, RoHS Directive
HD-T1C
30 mm 1.181 in (Linearity is specified at 28 mm 1.102 in width.)
30 mm 1.181 in (fixed) (Note 2)
3 (Industrial environment)
0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +55 ℃ -4 to +131℉
35 to 85 % RH, Storage: 35 to 85 % RH
Incandescent light: 3,000 lx at the light-receiving face, Fluorescent light: 3,000 lx at the light-receiving face
1,000 V AC for one min. between all supply terminals connected together and enclosure
20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure
10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each
490 m/s2 acceleration (50 G approx.) in X, Y and Z directions three times each
Red LED (Peak emission wavelength: 650 nm 0.026 mil)
Photodiode
Enclosure: PEI, Front cover: Glass, Mounting base: Aluminum
Heat-resistant PVC cable, 0.5 m 1.640 ft long, with a connector at the end
Net weight: 150 g approx.
EMC Directive, RoHS Directive
3 (Industrial environment)
0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +70 ℃ -4 to +158℉
35 to 85 % RH, Storage: 35 to 85 % RH
1,000 V AC for one min. between all supply terminals connected together and enclosure
20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure
10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each
490 m/s2 acceleration (50 G approx.) in X, Y and Z directions three times each
Enclosure: Heat-resistant ABS, Connector cover: Heat-resistant ABS, Adjuster cover: Polycarbonate
0.22 mm2 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long
Net weight: 85 g approx.
HD-T1030
24 V DC ± 10 % Ripple P-P 10 % or less
70 mA or less (Including sensor head)
Analog voltage
- Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received)
- Output impedance: 75 Ω
0.5 ms or less (8 V/ms or more)
30 μm 1.181 mil
(Note):Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).
±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center)
(Note):This is the representative example of measurement with a combination of sensor head and controller.
±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6℉)
(Note):This is the representative example of measurement with a combination of sensor head and controller.
Span of the analog output voltage is adjusted. 15-turn endless adjuster
Offset of the analog output voltage is adjusted. 15-turn endless adjuster
30 min. or more
Extension up to total 3 m 9.843 ft is possible with 0.3 mm2, or more, heat-resistant PVC cable.