M-DW1
Specification
| Item | Performance characteristics |
|---|---|
| CE Marking Directive Compliance | EMC Directive, RoHS Directive |
| Center Sensing Distance | 45 mm 1.772 in |
| Sensing Object | 3 inch or larger semiconductor wafer (Note：In case of 8 inch or less wafers, the wafer pitch, the orientation flat or surface condition may affect the sensing.) |
| Detectable Surface | Surface having a side edge which reflects light in the light receiving direction (Note：Polished wafers, etc., which have a sharp edge cannot be detected since they do not reflect the light in the light receiving direction.) |
| Sensing Angle | 12.5 ± 5° (Note：Since the position of the orientation flat may vary by ±20° due to its rotation.) |
| Wafer Pitch | Separate sensing is possible at normal sensitivity for 3 mm 0.118 in pitch or more (Note:This is the pitch of an 8 inch wafer near its center region when it is inserted in an inclined fashion. When detecting a wafer having an orientation flat, the wafer pitch becomes still smaller when sensing at positions which avoid the orientation flat. In this case, the sensing signal cannot be resolved and it becomes a continuous, broad signal.) |
| Suitable Cassette | SEMI standard FOUP cassette / open cassette |
| Supply Voltage | 12 to 24 V DC ± 10 % Ripple P-P 10 % or less |
| Current Consumption | 65 mA or less |
| Output | NPN output / PNP output, selectable with output selection switch NPN open-collector transistor - Maximum sink current: 100 mA - Applied voltage: 30 V DC or less (between output and 0 V) - Residual voltage: 1 V or less (at 100 mA sink current) 0.4 V or less (at 16 mA sink current) PNP open-collector transistor - Maximum source current: 100 mA - Applied voltage: 30 V DC or less (between output and +V) - Residual voltage: 1 V or less (at 100 mA source current) 0.4 V or less (at 16 mA source current) |
| Output: Output Operation | Light-ON / Dark-ON, selectable by switch |
| Output: Short-Circuit Protection | Incorporated (restored automatically) |
| Response Time | 500 μs or less |
| Operation Indicator | Orange LED (lights up when the output is ON) |
| Stability Indicator | Green LED (lights up under stable light received condition or stable dark condition) |
| Timer Function | Approx. 2 ms fixed OFF-delay timer, switchable either effective or ineffective |
| Test Input (Emission Halt Input) | Signal condition - Emission Halt: Open, or 4 to 8 V - Emission: 0 to 3 V, or 9 V to +V (26.4 V max.) |
| Sensitivity Selection Input | Signal condition - Input OFF: Open, or 4 to 8 V - Input ON: 0 to 3 V, or 9 V to +V (26.4 V max.) |
| Sensitivity Setting | Back surface teaching: effectuated with sensor's sensitivity setting button Detection sensitivity selection: 4 levels with sensor's 2 bit switch or 2 levels with external input selectable |
| Ambient Temperature | 0 to +55 ℃ +32 to +131 ℉ (No dew condensation), Storage: -10 to +70 ℃ +14 to +158 ℉ |
| Ambient Humidity | 35 to 85 % RH, Storage: 35 to 85 % RH |
| Ambient Illuminance | Incandescent light: 3,000 lx or less at the light-receiving face, Fluorescent light: 1,500 lx or less at the light-receiving face |
| Voltage Withstandability | 1,000 V AC for one min. between all supply terminals connected together and enclosure |
| Insulation Resistance | 20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure |
| Vibration Resistance | 10 to 500 Hz frequency, 3 mm 0.118 in double amplitude in X, Y and Z directions for two hours each |
| Shock Resistance | 98 m/s2 acceleration (10 G approx) in X, Y and Z directions five times each |
| Emitting Element | LED (modulated) |
| Material | Enclosure: ABS and Stainless steel (SUS301), Lens: Acrylic |
| Cable | 0.15 mm2 5-core cabtyre cable, 300 mm 11.811 in long |
| Cable Extension | Extension up to total 10 m 32.808 ft is possible with 0.15 mm2, or more, cable. |
| Weight (Typ.) | Net weight: 75 g approx. |
Stock Check
Important
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