The HD-T1 Series is a new Wafer Alignment Sensor that uses a safe red LED light beam, with a resolution of 30µm, to achieve the same high level performance as Laser Sensors. The HD-T1 Sensor is best suited to detect wafer eccentricity, notches and orientation flats. Using linear image Sensor methodology and high-speed sampling technology, a wide variety of objects can now be stably measured with great precision at ultra-high speeds. This CCD style Sensor is developed for use in almost all fields of industry, e.g. tire manufacturing or Semiconductor production (Wafer Printed Circuit Boards).
Characteristics:
No Safety Measures Are Required
High Resolution Of 30µm
Easy Installation
No Need For Beam Axis Alignment
Low Current Consumption Of 70mA Or Less
Adjustment Functions For Both Span And Shift Have Been Incorporated
LED Type Wafer Alignment Sensor Controller HD-T1
Part number list
Results 2
Models table for series LED Type Wafer Alignment Sensor Controller HD-T1
0.22 mm2 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long
Net weight: 85 g approx.
HD-T1030
24 V DC ± 10 % Ripple P-P 10 % or less
70 mA or less (Including sensor head)
Analog voltage - Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received) - Output impedance: 75 Ω
0.5 ms or less (8 V/ms or more)
30 μm 1.181 mil (Note):Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).
±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center) (Note):This is the representative example of measurement with a combination of sensor head and controller.
±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6℉) (Note):This is the representative example of measurement with a combination of sensor head and controller.
Span of the analog output voltage is adjusted. 15-turn endless adjuster
Offset of the analog output voltage is adjusted. 15-turn endless adjuster
30 min. or more
Extension up to total 3 m 9.843 ft is possible with 0.3 mm2, or more, heat-resistant PVC cable.
Models table for series LED Type Wafer Alignment Sensor Controller HD-T1
0.22 mm2 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long
Net weight: 85 g approx.
HD-T1030
24 V DC ± 10 % Ripple P-P 10 % or less
70 mA or less (Including sensor head)
Analog voltage - Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received) - Output impedance: 75 Ω
0.5 ms or less (8 V/ms or more)
30 μm 1.181 mil (Note):Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).
±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center) (Note):This is the representative example of measurement with a combination of sensor head and controller.
±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6℉) (Note):This is the representative example of measurement with a combination of sensor head and controller.
Span of the analog output voltage is adjusted. 15-turn endless adjuster
Offset of the analog output voltage is adjusted. 15-turn endless adjuster
30 min. or more
Extension up to total 3 m 9.843 ft is possible with 0.3 mm2, or more, heat-resistant PVC cable.