LED Type Wafer Alignment Sensor Controller HD-T1

The HD-T1 Series is a new Wafer Alignment Sensor that uses a safe red LED light beam, with a resolution of 30µm, to achieve the same high level performance as Laser Sensors. The HD-T1 Sensor is best suited to detect wafer eccentricity, notches and orientation flats. Using linear image Sensor methodology and high-speed sampling technology, a wide variety of objects can now be stably measured with great precision at ultra-high speeds. This CCD style Sensor is developed for use in almost all fields of industry, e.g. tire manufacturing or Semiconductor production (Wafer Printed Circuit Boards).

Characteristics:

No Safety Measures Are Required
High Resolution Of 30µm
Easy Installation
No Need For Beam Axis Alignment
Low Current Consumption Of 70mA Or Less
Adjustment Functions For Both Span And Shift Have Been Incorporated

Models table for series LED Type Wafer Alignment Sensor Controller HD-T1
Part No.	Datasheet	CE Marking Directive Compliance	Applicable Controller	Sensing Width	Sensing Range	Pollution Degree	Ambient Temperature	Ambient Humidity	Ambient Illuminance	Voltage Withstandability	Insulation Resistance	Vibration Resistance	Shock Resistance	Emitting Element	Receiving Element	Material	Cable	Weight (Typ.)	Applicable Sensor Head	Supply Voltage	Current Consumption	Analog Output	Analog Output: Response Time	Analog Output: Resolution	Analog Output: Linearity	Analog Output:Temperature Characteristics	Span Adjustment Function	Shift Adjustment Function	Warming-Up Period	Cable Extension
HD-T1C		EMC Directive, RoHS Directive				3 (Industrial environment)	0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +70 ℃ -4 to +158℉	35 to 85 % RH, Storage: 35 to 85 % RH		1,000 V AC for one min. between all supply terminals connected together and enclosure	20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure	10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each	490 m/s² acceleration (50 G approx.) in X, Y and Z directions three times each			Enclosure: Heat-resistant ABS, Connector cover: Heat-resistant ABS, Adjuster cover: Polycarbonate	0.22 mm² 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long	Net weight: 85 g approx.	HD-T1030	24 V DC ± 10 % Ripple P-P 10 % or less	70 mA or less (Including sensor head)	Analog voltage - Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received) - Output impedance: 75 Ω	0.5 ms or less (8 V/ms or more)	30 μm 1.181 mil (Note):Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).	±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center) (Note):This is the representative example of measurement with a combination of sensor head and controller.	±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6℉) (Note):This is the representative example of measurement with a combination of sensor head and controller.	Span of the analog output voltage is adjusted. 15-turn endless adjuster	Offset of the analog output voltage is adjusted. 15-turn endless adjuster	30 min. or more	Extension up to total 3 m 9.843 ft is possible with 0.3 mm², or more, heat-resistant PVC cable.
HD-T1030		EMC Directive, RoHS Directive	HD-T1C	30 mm 1.181 in (Linearity is specified at 28 mm 1.102 in width.)	30 mm 1.181 in (fixed) (Note 2)	3 (Industrial environment)	0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +55 ℃ -4 to +131℉	35 to 85 % RH, Storage: 35 to 85 % RH	Incandescent light: 3,000 lx at the light-receiving face, Fluorescent light: 3,000 lx at the light-receiving face	1,000 V AC for one min. between all supply terminals connected together and enclosure	20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure	10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each	490 m/s² acceleration (50 G approx.) in X, Y and Z directions three times each	Red LED (Peak emission wavelength: 650 nm 0.026 mil)	Photodiode	Enclosure: PEI, Front cover: Glass, Mounting base: Aluminum	Heat-resistant PVC cable, 0.5 m 1.640 ft long, with a connector at the end	Net weight: 150 g approx.

Models table for series LED Type Wafer Alignment Sensor Controller HD-T1
Part No.	Datasheet	CE Marking Directive Compliance	Applicable Controller	Sensing Width	Sensing Range	Pollution Degree	Ambient Temperature	Ambient Humidity	Ambient Illuminance	Voltage Withstandability	Insulation Resistance	Vibration Resistance	Shock Resistance	Emitting Element	Receiving Element	Material	Cable	Weight (Typ.)	Applicable Sensor Head	Supply Voltage	Current Consumption	Analog Output	Analog Output: Response Time	Analog Output: Resolution	Analog Output: Linearity	Analog Output:Temperature Characteristics	Span Adjustment Function	Shift Adjustment Function	Warming-Up Period	Cable Extension
HD-T1C		EMC Directive, RoHS Directive				3 (Industrial environment)	0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +70 ℃ -4 to +158℉	35 to 85 % RH, Storage: 35 to 85 % RH		1,000 V AC for one min. between all supply terminals connected together and enclosure	20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure	10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each	490 m/s² acceleration (50 G approx.) in X, Y and Z directions three times each			Enclosure: Heat-resistant ABS, Connector cover: Heat-resistant ABS, Adjuster cover: Polycarbonate	0.22 mm² 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long	Net weight: 85 g approx.	HD-T1030	24 V DC ± 10 % Ripple P-P 10 % or less	70 mA or less (Including sensor head)	Analog voltage - Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received) - Output impedance: 75 Ω	0.5 ms or less (8 V/ms or more)	30 μm 1.181 mil (Note):Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).	±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center) (Note):This is the representative example of measurement with a combination of sensor head and controller.	±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6℉) (Note):This is the representative example of measurement with a combination of sensor head and controller.	Span of the analog output voltage is adjusted. 15-turn endless adjuster	Offset of the analog output voltage is adjusted. 15-turn endless adjuster	30 min. or more	Extension up to total 3 m 9.843 ft is possible with 0.3 mm², or more, heat-resistant PVC cable.
HD-T1030		EMC Directive, RoHS Directive	HD-T1C	30 mm 1.181 in (Linearity is specified at 28 mm 1.102 in width.)	30 mm 1.181 in (fixed) (Note 2)	3 (Industrial environment)	0 to +40 ℃ +32 to +104℉ (No dew condensation), Storage: -20 to +55 ℃ -4 to +131℉	35 to 85 % RH, Storage: 35 to 85 % RH	Incandescent light: 3,000 lx at the light-receiving face, Fluorescent light: 3,000 lx at the light-receiving face	1,000 V AC for one min. between all supply terminals connected together and enclosure	20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure	10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each	490 m/s² acceleration (50 G approx.) in X, Y and Z directions three times each	Red LED (Peak emission wavelength: 650 nm 0.026 mil)	Photodiode	Enclosure: PEI, Front cover: Glass, Mounting base: Aluminum	Heat-resistant PVC cable, 0.5 m 1.640 ft long, with a connector at the end	Net weight: 150 g approx.

LED Type Wafer Alignment Sensor Controller HD-T1

Part Number List