The SQ4 Series Safety Liquid Leak Sensor detect leaks and curbs danger resulting from them.
The two-part design, consisting of the Sensor and the mounting bracket, simplifies installation. The Sensor itself incorporates a two-stage detection. The detection unit at the front of the Sensor issues a warning if it comes into contact with liquid, and the detection unit in the center of the Sensor initiates an emergency stop if it becomes immersed in liquid.
To provide utmost flexibility, a chemically resistant version is also available. Up to 4 Safety Liquid Leak Sensors can be connected to the SQ4-C11 Controller.
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: Polypropylene
0.18 mm2 4-core PVC cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1:The agents mentioned above are examples. It may not be detected depending on viscosity the agent.Before using this device, check the detecting liquid and installation condition.) (Note 2:Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay.)
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1) Fluorinert(TM) is the world wide trademark of 3M. Galden is the world wide trademark of Solvay Solexis. (Note 2) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: PFA
0.1 mm2 4-core PFA cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: Polypropylene
0.18 mm2 4-core PVC cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
ISO 13849-1 (Category 4, PLe), IEC 60947-5-2, IEC 61508-1 to 7 (SIL3), IEC 62061 (SIL3)
JIS B 9705-1 (Category 4), JIS C 0508-1 to 7 (SIL3)
EN 60947-5-2, EN 55011 Class A, EN 61000-6-2, EN 50178, EN ISO 13849-1 (Category 4, PLe), EN 61508-1 to 7 (SIL3) (Note) Regarding EU Machinery Directive, a Notified Body, TUV SUD, has certified with the type examination certificate.
S1-G-1-2009, S2-W-5-2009
Conforming to SEMI-S2-0310a
24 V DC+10-15 % Ripple P-P 10 % or less
200 mA or less
PNP open-collector transistor / NPN open-collector transistor (switch method) [Selecting PNP output] - Maximum source current: 200 mA - Applied voltage: Same as power voltage (between control output to +V) - Residual voltage: 2.5 V or less (at 200 mA source current) [Selecting NPN output] - Maximum sink current: 200 mA - Applied voltage: Same as power voltage (between control output to 0 V) - Residual voltage: 2.0 V or less (at 200 mA sink current)
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
20 ms or less (excluding the response time of the sensor)
PNP open-collector transistor / NPN open-collector transistor (switch method) [Selecting PNP output] - Maximum source current: 60 mA - Applied voltage: Same as power voltage(between sensor monitor output to +V) - Residual voltage: 2.5 V or less (at 60 mA source current) [Selecting NPN output] - Maximum sink current: 60 m A - Applied voltage: Same as power voltage(between sensor monitor output to 0 V) - Residual voltage: 2.0 V or less (at 60 mA sink current)
ON when normal condition, OFF when initial detection or accidental leakage
100 ms or less (excluding the response time of the sensor)
OFF for lockout (Rating: Same as sensor monitor output)
IP20 (IEC) (However, it should be in IP54 protection structure of control panel)
Interlock / lockout cancel / Test input / External device monitor / Safety input / Control output polarity selection / Non-safety output polarity selection / Sensor connection number setting
Negative logic output of control output 1 / 2 (OSSD 1 / 2) (Rating: Same as sensor monitor output) [Auxiliary output ON when control output 1 / 2 (OSSD 1/2) is OFF]
-10 to +55 ℃ +14 to +131℉ (No dew condensation or icing allowed), Storage: -20 to +70 ℃ -4 to +158 ℉
35 to 85 % RH, Storage: 35 to 85 % RH
2.55 x 10-9 (when connecting 4 safety liquid connecting sensors)
100 years or more
Main unit case: PC + ABS (alloy)
Net weight: 170 g approx Gross weight: 440 g approx
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1:The agents mentioned above are examples. It may not be detected depending on viscosity the agent.Before using this device, check the detecting liquid and installation condition.) (Note 2:Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay.)
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1) Fluorinert(TM) is the world wide trademark of 3M. Galden is the world wide trademark of Solvay Solexis. (Note 2) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: PFA
0.1 mm2 4-core PFA cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
Models table for series Safety Liquid Leak Sensor [Control Category 4 PLe SIL3] SQ4
Part No.
Datasheet
CE Marking Directive Compliance
Applicable Standards: International Standard
Applicable Standards: Japan
Applicable Standards: Europe (EU)
Applicable Standards: South Korea
Applicable Standards: SEMI
Sensing Object
Sensing Range
Power Voltage
Current Consumption
Utilization Category
Detection Output (Leakage Detection)
Detection Output (Leakage Detection): Response Time
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: Polypropylene
0.18 mm2 4-core PVC cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1:The agents mentioned above are examples. It may not be detected depending on viscosity the agent.Before using this device, check the detecting liquid and installation condition.) (Note 2:Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay.)
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1) Fluorinert(TM) is the world wide trademark of 3M. Galden is the world wide trademark of Solvay Solexis. (Note 2) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
NPN open-collector transistor - Maximum sink current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and 0 V) - Residual voltage: 2 V or less (at 50 mA sink current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: PFA
0.1 mm2 4-core PFA cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
Water (Standard liquid) (Note) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: Polypropylene
0.18 mm2 4-core PVC cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx
ISO 13849-1 (Category 4, PLe), IEC 60947-5-2, IEC 61508-1 to 7 (SIL3), IEC 62061 (SIL3)
JIS B 9705-1 (Category 4), JIS C 0508-1 to 7 (SIL3)
EN 60947-5-2, EN 55011 Class A, EN 61000-6-2, EN 50178, EN ISO 13849-1 (Category 4, PLe), EN 61508-1 to 7 (SIL3) (Note) Regarding EU Machinery Directive, a Notified Body, TUV SUD, has certified with the type examination certificate.
S1-G-1-2009, S2-W-5-2009
Conforming to SEMI-S2-0310a
24 V DC+10-15 % Ripple P-P 10 % or less
200 mA or less
PNP open-collector transistor / NPN open-collector transistor (switch method) [Selecting PNP output] - Maximum source current: 200 mA - Applied voltage: Same as power voltage (between control output to +V) - Residual voltage: 2.5 V or less (at 200 mA source current) [Selecting NPN output] - Maximum sink current: 200 mA - Applied voltage: Same as power voltage (between control output to 0 V) - Residual voltage: 2.0 V or less (at 200 mA sink current)
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
20 ms or less (excluding the response time of the sensor)
PNP open-collector transistor / NPN open-collector transistor (switch method) [Selecting PNP output] - Maximum source current: 60 mA - Applied voltage: Same as power voltage(between sensor monitor output to +V) - Residual voltage: 2.5 V or less (at 60 mA source current) [Selecting NPN output] - Maximum sink current: 60 m A - Applied voltage: Same as power voltage(between sensor monitor output to 0 V) - Residual voltage: 2.0 V or less (at 60 mA sink current)
ON when normal condition, OFF when initial detection or accidental leakage
100 ms or less (excluding the response time of the sensor)
OFF for lockout (Rating: Same as sensor monitor output)
IP20 (IEC) (However, it should be in IP54 protection structure of control panel)
Interlock / lockout cancel / Test input / External device monitor / Safety input / Control output polarity selection / Non-safety output polarity selection / Sensor connection number setting
Negative logic output of control output 1 / 2 (OSSD 1 / 2) (Rating: Same as sensor monitor output) [Auxiliary output ON when control output 1 / 2 (OSSD 1/2) is OFF]
-10 to +55 ℃ +14 to +131℉ (No dew condensation or icing allowed), Storage: -20 to +70 ℃ -4 to +158 ℉
35 to 85 % RH, Storage: 35 to 85 % RH
2.55 x 10-9 (when connecting 4 safety liquid connecting sensors)
100 years or more
Main unit case: PC + ABS (alloy)
Net weight: 170 g approx Gross weight: 440 g approx
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1:The agents mentioned above are examples. It may not be detected depending on viscosity the agent.Before using this device, check the detecting liquid and installation condition.) (Note 2:Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay.)
Sulfuric acid, Hydrochloric acid,Phosphoric acid, Ammonia, Fluorinert (Note 1), Galden (Note 1), Hydrofl uoric acid etc. (Note 2) (Note 1) Fluorinert(TM) is the world wide trademark of 3M. Galden is the world wide trademark of Solvay Solexis. (Note 2) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition.
12 to 24 V DC plus or minus 10 % Ripple P-P 10 % or less
30 mA or less
DC-12, DC-13
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
10 ms or less
ON when normal condition or initial detection, OFF when detection leakage or wrong installation
PNP open-collector transistor - Maximum source current: 50 mA - Applied voltage: Same as the supply voltage (between detection auxiliary output and +V) - Residual voltage: 2.5 V or less (at 50 mA source current)
50 ms or less
ON when normal condition, OFF when initial detection or accidental leakage
IP65 / IP67 (IEC)
-10 to +55 ℃ +14 to +131 ℉ (No dew condensation or icing allowed) (Note) Storage: -10 to +55 ℃ +14 to +131 ℉ (Note) Liquid being detected should be also kept within the rated ambient temperature range.
35 to 85 % RH, Storage: 35 to 85 % RH
Infrared LED (modulated)
Enclosure: PFA
0.1 mm2 4-core PFA cabtyre cable, 2 m 6.562 ft long
Net weight: 45 g approx Gross weight: 110 g approx