| | EMC Directive, RoHS Directive | 45 mm 1.772 in | 3 inch or larger semiconductor wafer (Note:In case of 8 inch or less wafers, the wafer pitch, the orientation flat or surface condition may affect the sensing.) | Surface having a side edge which reflects light in the light receiving direction (Note:Polished wafers, etc., which have a sharp edge cannot be detected since they do not reflect the light in the light receiving direction.) | 12.5 ± 5° (Note:Since the position of the orientation flat may vary by ±20° due to its rotation.) | Separate sensing is possible at normal sensitivity for 3 mm 0.118 in pitch or more (Note:This is the pitch of an 8 inch wafer near its center region when it is inserted in an inclined fashion. When detecting a wafer having an orientation flat, the wafer pitch becomes still smaller when sensing at positions which avoid the orientation flat. In this case, the sensing signal cannot be resolved and it becomes a continuous, broad signal.) | SEMI standard FOUP cassette / open cassette | 12 to 24 V DC ± 10 % Ripple P-P 10 % or less | 65 mA or less | NPN output / PNP output, selectable with output selection switch
NPN open-collector transistor - Maximum sink current: 100 mA - Applied voltage: 30 V DC or less (between output and 0 V) - Residual voltage: 1 V or less (at 100 mA sink current) 0.4 V or less (at 16 mA sink current)
PNP open-collector transistor - Maximum source current: 100 mA - Applied voltage: 30 V DC or less (between output and +V) - Residual voltage: 1 V or less (at 100 mA source current) 0.4 V or less (at 16 mA source current) | Light-ON / Dark-ON, selectable by switch | Incorporated (restored automatically) | 500 μs or less | Orange LED (lights up when the output is ON) | Green LED (lights up under stable light received condition or stable dark condition) | Approx. 2 ms fixed OFF-delay timer, switchable either effective or ineffective | Signal condition - Emission Halt: Open, or 4 to 8 V - Emission: 0 to 3 V, or 9 V to +V (26.4 V max.) | Signal condition - Input OFF: Open, or 4 to 8 V - Input ON: 0 to 3 V, or 9 V to +V (26.4 V max.) | Back surface teaching: effectuated with sensor's sensitivity setting button Detection sensitivity selection: 4 levels with sensor's 2 bit switch or 2 levels with external input selectable | 0 to +55 ℃ +32 to +131 ℉ (No dew condensation), Storage: -10 to +70 ℃ +14 to +158 ℉ | 35 to 85 % RH, Storage: 35 to 85 % RH | Incandescent light: 3,000 lx or less at the light-receiving face, Fluorescent light: 1,500 lx or less at the light-receiving face | 1,000 V AC for one min. between all supply terminals connected together and enclosure | 20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure | 10 to 500 Hz frequency, 3 mm 0.118 in double amplitude in X, Y and Z directions for two hours each | 98 m/s2 acceleration (10 G approx) in X, Y and Z directions five times each | LED (modulated) | Enclosure: ABS and Stainless steel (SUS301), Lens: Acrylic | 0.15 mm2 5-core cabtyre cable, 300 mm 11.811 in long | Extension up to total 10 m 32.808 ft is possible with 0.15 mm2, or more, cable. | Net weight: 75 g approx. |